Reliability is one of the most important challenges with respect to mass manufacturing. Indeed, qualifying mechanical devices like MEMS-switches is not a trivial task. The approach followed by OMMIC is to use their commercially qualified foundry process as a basis and realise the MEMS-switches as additional layers in an additional process, packaging included. This ensures compatibility with the existing MMIC-production processes, thus offering the shortest route to reliable RF-MEMS MMIC components; the transferring of the RF-MEMS process from the laboratory clean rooms to the production clean rooms. This is the final step in the mass-production process qualification.